FPGA-AFM+ODMR

Confocal microscope+AFM(original)

RT・ambient(liquid phase)Scanning NV center diamond probe

　Confocal microscope(NIKON）+AFM

Scanning microwave probe

UHV-scanning microwave microscope

UHV-LT-scanning probe microscope

Optical microscope+Manipulator

Lock-in thermography

Machine Tools

Electronic circuit board machine tool

measurement

• LabVIEW
• MATLAB

other device